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10 May, 17:50

The mobility and carrier density of Al are 12 cm2/Vs and 1.98*1023 cm-3, respectively. The mobility and carrier density of Cu are 43.2 cm2/Vs and 8.5*1022 cm-3, respectively. [20 pts] Q3.1 Calculate the resisitivity of Al and Cu Q3.2 Which one would you use as interconnects in advanced CMOS nod

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  1. 10 May, 18:35
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    R aluminium = 2.63x10^-6 Ω*cm

    Rcopper = 1.7 x10^-6 Ω*cm

    I would use Cu as interconnections in advanced CMOS nodes.

    Explanation:

    the conductivity formula equals:

    σ = n*g*u

    n = carrier concentration

    u = mobility

    g = charge of carrier

    The resistivity is equal to:

    R = 1/σ

    For the aluminium, we have:

    g = 1.602x10^-19 C

    R = 1 / (1.98x10^23 * 1.602x10^-19 * 12 = 2.63x10^-6 Ω*cm

    For copper:

    R = 1 / (8.5x10^22 * 1.602x10^-19 * 43.2) = 1.7 x10^-6 Ω*cm

    According to the calculations found for both resistivities, I would use Cu as interconnections in advanced CMOS nodes, since copper has a lower resistivity and therefore, copper conducts electricity better.
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